한국광과학회:학술대회논문집 (Proceedings of the Korean Society of Potoscience Conference)
- 한국광과학회 2000년도 학술대회지
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- Pages.14-14
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- 2000
Gigabit 반도체 광미세가공용 감광재료의 발전과 전망
Progress of Photoresist Materials for Gigabit IC Photolithography
- Ahn Kwang-Duk (Molecular Engineering Laboratory, Polymer & Biomaterials Research Center Korea Institute of Science and Technology)
- 발행 : 2000.06.01