Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2000.05a
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  • Pages.617-620
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  • 2000
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Control performance evaluation of ultra precision servo apparatus(II)

초정밀서보기구의 제어성능 평가(II)

  • 김재열 (조선대학교 공과대학 기계공학부) ;
  • 김영석 (조선대학교 공과대학 기계공학) ;
  • 곽이구 (조선대학교 공과대학 정밀기계공학과 대학) ;
  • 마상동 (조선대학교 공과대학 정밀기계공학과 대학) ;
  • 한재호 (송원대학 자동차과)
  • Published : 2000.05.01
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Abstract

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

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