제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지

Object-oriented model for Generic Equipment Model

  • Jung, Myong-Soon (Department of Elec. and Comp., Kangwon National University) ;
  • Ahn, Gye-Jin (Department of Elec. and Comp., Kangwon National University) ;
  • Park, Hong-Seong (Department of Elec. and Comp., Kangwon National University)
  • Published : 2000.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper proposes an Object-oriented model for Generic Equipment Model(GEM) which is applied to semiconductor processing Equipment. A proposed implementation model for GEM consists of three modules : a module to convert SECS-II message and a module to transmit messages between GEM and a physical equipment. The proposed Object-oriented model for GEM has advantages in reuse and user management from the point of view of development program. Especially, this paper proposes a GEM agent COM, which is a base of GEM, transmits messages and events among modules. This Object-oriented model is analysed and developed by using UML.

Keywords