제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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- Pages.290-290
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- 2000
반도체 제조 장비를 위한 개방형 제어기 플랫폼 설계
A Design of an Open Architectural Controller Platform for Semiconductor Manufacturing Equipment
초록
This paper presents some ideas about an open architectural controller platform for semiconductor manufacturing equipment First, we proposed modular-typed software architecture. Each module is composed of commands and status sets. Second, common bus protocol is suggested in order to communicate with other modules. It is designed with visual c++ programming. Finally, job program is consisted of simple commands and status. Consequently, Controllers are easily developed with some required modular assembling.