제어로봇시스템학회:학술대회논문집
- 2000.10a
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- Pages.62-62
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- 2000
Development of auto-tuning PID controller for Temperature Control systems and Its Application to Rapid Thermal Processor
온도제어용 자동동조 PID 제어기 설계와 RTP에의 적용
Abstract
An auto-tuning PID controller which is adequate for temperature control is developed based on relay-control and pole-placement Using the critical frequency which is obtained from relay-control parameters of assumed model are identified. Pole/zero-placement PID controller is designed for the identified model. The desired pole/zeros are determined so that the closed-loop has overshoot free step response. The developed auto-tuning PID controller was successfully applied to the temperature control of RTP.
Keywords