Nd:YAG 레이저의 근적외선과 자외선 펄스를 이용한 NiP 하드디스크 기층의 세척

Cleaning of Nip Hard Disk Substrate Using Near-Infrared and Ultraviolet Irradiation of Nd:Yag Laser Pulses

This paper introduces a cleaning process for removing submicron-sized particles from NiP hard disk substrates by the liquid-assisted laser cleaning technique. Measurements of cleaning performance and time-resolved optical diagnostics are performed to analyze the physical mechanism of contaminant removal. The results reveal that nanosecond laser pulses are effective for removing the contaminants regardless of the wavelength and that a thermal mechanism involving explosive vaporization of liquid dominates the cleaning process.