Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication and characterization of $SnO_2$ anode thin film for thin film secondary battery

박막형 2차전지용 $SnO_2$음극 박막의 제작 및 특성 평가

  • 이성준 (경원대학교 전기전자공학과) ;
  • 신영화 (경원대학교 전기전자공학과) ;
  • 윤영수 (한국과학기술연구원 박막기술연구센터) ;
  • 조원일 (한국과학기술연구원 전지,연료전지센터)
  • Published : 2000.11.01
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Abstract

In this study, Tin oxide thin film for secondary battery was deposited on Pt/Ti/Si(100). It was fabricated by r.f. reactive sputtering with Tin metal target. At constant power (130W), pressure (Base 5$\times$10$^{-6}$ Torr, working 5$\times$10$^{-3}$ Torr) and at room temperature, it was fabricated by Ar/O2 gas ratio. After deposition, we got AFM & SEM to investigated surface of thin films and had XRD to find crystalline of thin films. Charge/discharge characteristics were carried out in 1M LiPF$_{6}$ , EC:DMC = 1:1 liquid electrolyte using lithium metal at room temperature.

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