Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The fabrication of high-response time, low consumption power, microflowsensor and its characteristics

고속응답, 저소비전력형 마이크로 유속센서의 제작과 그 특성

  • 홍석우 (동서대학교 정보통신공학부) ;
  • 김병태 (동서대학교 정보통신공학부) ;
  • 김길중 (동서대학교 정보통신공학부) ;
  • 정귀상 (동서대학교 정보통신공학부)
  • Published : 2000.11.01
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Abstract

This paper presents the characteristics of low consumption, high-response time hot-film type micro-flowsensors with SOI(Si-on-insulator) and trench structures. Output voltages increased due to increase of heat-loss from sensor to external. Compared with no-trench on the SOI structure, the micro-flowsensors with trench structures have properties of high output voltage and low consume power. Output voltage of micro-flowsensors with SOI and trench structures was 250 mV at $N_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time was about 85 msec when input flow was step-input.

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