Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The study on electrical properties of the NiCr thin film resistor

NiCr 박막저항의 전기적 특성 연구

  • 류제천 (한국표준과학연구원 전기실) ;
  • 김동진 (한국표준과학연구원 전기실) ;
  • 김용일 (한국표준과학연구원 전기실) ;
  • 강전홍 (한국표준과학연구원 전기실) ;
  • 김한준 (한국표준과학연구원 전기실) ;
  • 유광민 (한국표준과학연구원 전기실)
  • Published : 2000.11.01
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Abstract

We were fabricated of NiCr thin film resistors(TFR) on A1$_2$O$_3$(99.5%) substrates by dc magnetic sputtering system. The characteristics of electrical resistance (Sheet resistance & Temperature-Coefficient of the resistance-value:TCR) by annealing condition and reactive gas on the resistors were studied.

Keywords