Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2000.05a
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- Pages.27-28
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- 2000
Mechanical properties of TiN coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering
ICP 스퍼터링법에 의하여 제조된 TiN 피막의 기계적 특성에 관한 연구
Abstract
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