융합신호처리학회 학술대회논문집 (Proceedings of the Korea Institute of Convergence Signal Processing)
- 한국신호처리시스템학회 2000년도 추계종합학술대회논문집
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- Pages.145-148
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- 2000
회절 격자를 이용한 레이저 엔코더의 광 신호처리
Optical Signal Processing of Laser Encoder Using Diffraction Grating
초록
Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5
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