Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2000.11b
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- Pages.33-36
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- 2000
Active control of field emitter arrays with a-Si:H TFTs
비정질 실리콘 박막 트랜지스터에 의한 전계방출기 어레이의 능동제어
Abstract
Active-controlled field emitter arrays (ACFEAs) are developed by monolithically integrating molybdenum field emitter arrays with amorphous silicon thin film transistors (a-Si:H TFTs) on glass substrate. Transfer and output characteristics of the fabricated ACFEAs showed that the emission currents of FEAs can be accurately controlled by the gate bias voltages of TFTs. Also, the emission currents of the ACFEAs kept stable without any fluctuations during the 30 min-operation.
Keywords