Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2000.06b
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- Pages.107-110
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- 2000
fabrication of the tunneling devices for the minimal displacement sensing
미세변위 측정을 위한 턴널링소자의 제조
Abstract
In this experiment, we fabricated pyramid-type silicon tunneling devices in which a tunneling current flow between a micro-tip and Si
Keywords