Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)

Korean Tribology Society (한국트라이볼로지학회)
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An Experimental Study on the Micro-adhesion of Octadecyltrichlorosilane SAM on the Si Surface

OTS SAM의 미소 응착 특성에 관한 실험적 연구

  • 윤의성 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 박지현 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 한흥구 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지연구센터)
  • Published : 2000.11.01
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Abstract

The effect of OTS(octadecyltrichlorosilane) SAM(self-assembled monolayer) on the micro-adhesion has been studied. OTS SAM was formed on the Si(100) surface and SPM (scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. Pull-off forces of different tips on Si and OTS SAM surfaces were measured by SPM in different relative humidities. The surface of OTS SAM was changed to hydrophobic surface and the micro-adhesion force of OTS SAM was lower than that of pure Si. As the tip radius of curvature and the relative humidity increased. the micro-adhesion force increased. Based on the test results. the main parameter affected to the micro-adhesion was absorbed humidity on the surface.

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