Frictional Behavior of SAM Coated Silicon

SAM 코팅층의 미소마찰거동에 관한 연구

Stiction is an undesirable phenomenon that can be encountered often in Micro-Electro Mechanical Systems (MEMS) applications, In order to minimize this effect, Self-Assembled Monolayers (SAM) are commonly used. In this work the frictional characteristics of SAM are investigated using both micro-tribotester and SPM. It was found that the performance of SAM is quite sensitive to coating condition. The experimental results show promise for SAM to be used in sliding applications of micro systems.