한국전자파학회:학술대회논문집 (Proceedings of the Korea Electromagnetic Engineering Society Conference)
- 한국전자파학회 2000년도 종합학술발표회 논문집 Vol.10 No.1
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- Pages.104-108
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- 2000
초고주파 집적 회로를 위한 새로운 실리콘 MEMS 패키지
THE NOVEL SILICON MEMS PACKAGE FOR MMICs
초록
In this paper, we characterized a novel MEMS package using high resistivity silicon for microwave and millimeter-wave devices. The manufactured MEMS package shows -20dB of S
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