Proceedings of the Korea Electromagnetic Engineering Society Conference (한국전자파학회:학술대회논문집)
- 2000.11a
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- Pages.104-108
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- 2000
THE NOVEL SILICON MEMS PACKAGE FOR MMICs
초고주파 집적 회로를 위한 새로운 실리콘 MEMS 패키지
Abstract
In this paper, we characterized a novel MEMS package using high resistivity silicon for microwave and millimeter-wave devices. The manufactured MEMS package shows -20dB of S
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