한국전자파학회:학술대회논문집 (Proceedings of the Korea Electromagnetic Engineering Society Conference)
- 한국전자파학회 2000년도 종합학술발표회 논문집 Vol.10 No.1
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- Pages.95-98
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- 2000
유한 요소법(FEM)을 이용한 압전 박막 공진기(FBAR)의 공진 모드 해석
Finite Element Method Analysis of Film Bulk Acoustic Resonator
초록
Film bulk acoustic resonator used in microwave region can be analyzed by one-dimension Mason's model and one-dimensional numerical method, but it had several constraints to analyze effects of area variation, electrode-area variation, electrode-shape variation and spurious characteristics. To overcome these constraints film bulk acoustic resonator must be analysed by three dimensional numerical method. So, in this paper three dimensional finite element method was used to analyze several moles of resonance and was compared with the one dimension Mason's model analysis and analytic solution.
키워드