Proceedings of the Korea Electromagnetic Engineering Society Conference (한국전자파학회:학술대회논문집)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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Finite Element Method Analysis of Film Bulk Acoustic Resonator

유한 요소법(FEM)을 이용한 압전 박막 공진기(FBAR)의 공진 모드 해석

  • 송영민 (경북대학교 전자, 전기 공학부) ;
  • 정재호 (경북대학교 전자, 전기 공학부) ;
  • 이용현 (경북대학교 전자, 전기 공학부) ;
  • 이정희 (경북대학교 전자, 전기 공학부) ;
  • 최현철 (경북대학교 전자, 전기 공학부)
  • Published : 2000.11.01
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Abstract

Film bulk acoustic resonator used in microwave region can be analyzed by one-dimension Mason's model and one-dimensional numerical method, but it had several constraints to analyze effects of area variation, electrode-area variation, electrode-shape variation and spurious characteristics. To overcome these constraints film bulk acoustic resonator must be analysed by three dimensional numerical method. So, in this paper three dimensional finite element method was used to analyze several moles of resonance and was compared with the one dimension Mason's model analysis and analytic solution.

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