Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.802-805
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- 2000
Magnetic properties of high performance NdFeB perpendicular thin film
고성능 NdFeB 수직 박막자석의 자기적 특성
Abstract
Anistropic [Ta/NdFeB/Ta] thin film was sputtered on heated Si substrate by Nd