Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
- /
- Pages.663-666
- /
- 2000
Laser dissect writing from copper(II) formate using Ar+ laser
아르곤 이온 레이저를 이용한 CU의 직접 쓰기 기술
Abstract
Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)