Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.569-572
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- 2000
The fabrication of ultra-low consumption power type micro-heaters using SOI and trenche structures
SOI와 드랜치 구조를 이용한 초저소비전력형 미세발열체의 제작
Abstract
This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10
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