Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.499-502
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- 2000
Fabrication and Properties of $\alpha$ -$Fe_{2}O_{3}$ Thin Films Prepared by RF-magnetron sputtering method
RF-magnetron sputtering 법을 이용한 개스 센서용 $\alpha$ -$Fe_{2}O_{3}$ 박막의 제조 및 특성
Abstract
In this study,