Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic oscillator which generates elliptical oscillations. Elliptical oscillations are generated by synthesizing two degenerated modes. Direction of vibratory displacement was analyzed by employing the finite element method. So, we could recognize that the direction of the slider's movement was controlled by changing the Phase difference of the drive voltage.