Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.377-382
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- 2000
Film Bulk Acoustic Resonator(FBAR) using Bragg Reflector for IMT-2000 Bandpass Filter
Bragg 반사층을 이용한 IMT-2000 대역통과필터용 체적 탄성파 공진기
Abstract
Film bulk acoustic resonator (FBAR) using AIN reactively sputtered at room temperature was fabricated. The FBAR is composed of a piezoelectric aluminium nitride thin film, top electrode of Al and bottom electrode of Au connected by a short (200
Keywords
- FBAR;
- aluminium nitride;
- series resonance frequency;
- parallel resonance frequency;
- insertion loss;
- return loss;
- quality factor