Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.193-197
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- 2000
Sticking Coefficient in Bi-thin Film Prepared by IBS Method
- Yang, Sung-Ho (Dept.of Electric Electronics Engineering, Dongshin University) ;
- Park, Yong-Pil (Dept.of Electric Electronics Engineering, Dongshin University) ;
- Chun, Min-Woo (Dept.of Electric Electronics Engineering, Dongshin University) ;
- Park, Sung-Gyun (Dept.of Electric Electronics Engineering, Dongshin University) ;
- Park, Woon-Shik
- Published : 2000.07.01
Abstract
BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below 73