Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2000.11a
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- Pages.150-150
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- 2000
Fabrication of BLT-X Sputtering target and ferroelectric properties of BLT-X for FeRAM
FeRAM용 BLT-X sputtering target 제작 및 유전특성
Abstract
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