Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2000.11a
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- Pages.104-104
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- 2000
The Study of Fabrication Processing and Schottky Contact to 4H-SiC for Improving the Yield
수율 향상을 위한 4H-SiC 쇼키 접합 및 소자 제작공정기술 연구
Abstract
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