Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2000.11a
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- Pages.51-51
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- 2000
A Study on the effect of Ceria Particle in CMP(Chemical Mechanical Planarization) Process
CMP (Chemical Mechanical Planarization) 공정 중 Ceria Particle의 특성에 관한 연구
Abstract
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