Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2000.02a
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- Pages.101-101
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- 2000
Effect of Sr/Ta Ratio on the Ferroelectric Properties of SBT Thin Films Fabricated by LSMCD Process
LSMCD 공정으로 제조한 SBT 박막의 Sr/Ta 함량에 따른 강유전 특성
Abstract
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