X-Y 스테이지를 위한 초음파 리니터 모터의 설계

Design of Ultrasonic Linear Motor for X-Y Stage

An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic oscillator which generates elliptical oscillations. Elliptical oscillations are generated by synthesizing two degenerated modes. The design of a stator for an Ultrasonic linear motor was optimized with respect to vibration mode and direction of vibratory displacement by employing the finite element method. The motors were designed by varying the width of stator vibrator and the thickness, the length and the position of piezoceramics.