Development of Coreless Linear Motor

무철심형 리니어모터 개발

  • Published : 2000.04.01

Abstract

Liner DC motors are widely used for servo-actuator, which would be applied for semiconductor equipments and precise machining systems. we have been developed linear DC motor with high speed, acceleration and position accuracy. From performance test, the position accuracy. From performance test, the position and repeatability accuracy were able to be controlled with 10 ${\mu}{\textrm}{m}$ and $\pm$1 ${\mu}{\textrm}{m}$, respectively. The highest acceleration and speed were obtained 3 G and 2m/sec, respectively. Static thrust force was 270N, and then error was 25%.

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