Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2000.11a
- /
- Pages.643-648
- /
- 2000
- /
- 1598-2548(pISSN)
Vibration analysis of Atomic Force Microscopy
원자현미경(AFM)의 진동해석
- Jung, He-Won ;
-
Kim, Soo-Kyung
;
- Park, Gun-Soon ;
- Oh, Hyeong-Ryeol ;
- Kim, Jin-Yong ;
- Shim, Jong-Youp ;
-
Gweon, Dae-Gab
- 정희원 (LG전자 DM 연구소) ;
-
김수경
(LG전자 DM 연구소)
;
- 박건순 (LG전자 DM 연구소) ;
- 오형렬 (LG전자 DM 연구소) ;
- 김진용 (LG전자 DM 연구소) ;
- 신종엽 (한국과학기술원 기계공학과) ;
-
권대갑
(한국과학기술원 기계공학과)
- Published : 2000.11.16
Abstract
The AFM is an imaging tool or a profiler with unprecedented 3-D resolution for various surface types. The AFM technology, however, leaves a lot of room for improvement due to its delicate and fragile probing mechanism. The distance between probe tip and sample surface must be maintained in below the nano meter level in order to measure the sample surface in Angstrom resolution. In this paper, the mode analysis of AFM system, modification based on the mode analysis are performed and finally the sample surface is measured by the home-built AFM.
Keywords