LC 공진을 이용한 원격측정용 실리콘 압력센서

Telemetry Silicon Pressure Sensor Using LC Resonance

  • 김순영 (아주대학교 마이크로실험실) ;
  • 박진성 (아주대학교 마이크로실험실) ;
  • 양상식 (아주대학교 마이크로실험실)
  • 발행 : 2000.07.17

초록

This paper presents an implantable telemetry LC resonance-type pressure sensor for the measurement of the ventricle pressure. This sensor consists of a capacitor and an inductor. This resonant circuit is magnetically coupled with an external antenna coil. The resonance frequency of the circuit decreases as the sensor capacitance is increased by the applied pressure. The inductance and the capacitance are 428nH and 0.98${\mu}F$, respectively. The resonance frequency is 245.7MHz when the differential pressure is zero. The sensitivity of the sensor is 9.477kHz/Pa.

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