대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2000년도 하계학술대회 논문집 C
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- Pages.2239-2241
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- 2000
Ni 도금 구조물을 이용한 전자력 구동 Al 미러의 제작
Fabrication of Al mirror with Ni electroplated structure for magnetic actuation
- Lim, Tae-Sun (School of Electrical and Computer Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical and Computer Engineering, Seoul National University) ;
- Choi, Hyung (Samsung Electronics)
- 발행 : 2000.07.17
초록
In this study, we fabricated surface micromachined mirror that is actuated by magnetic force. The mirror was fabricated with Al, and Ni was electroplated on the surface of Al mirror as a magnetic material. The fabricated mirror is actuated by magnetic force of simple solenoid. The maximum deflection angle is about 70
키워드