Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.07c
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- Pages.2230-2232
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- 2000
A Surface-Bulk Micromachined Electromagnetic Gyroscope Operating at Atmospheric Pressure
표면 및 몸체 미세 가공 기술로 제작된 대기압에서 동작하는 전자력 검출형 각속도계의 연구
- Kim, Seong-Hyok (School of Electrical and Computer Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical and Computer Engineering, Seoul National University) ;
- Song, Jin-Woo (School of Electrical and Computer Engineering, Seoul National University) ;
- Lee, Jang-Gyu (School of Electrical and Computer Engineering, Seoul National University)
- Published : 2000.07.17
Abstract
This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400
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