Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.07c
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- Pages.1503-1505
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- 2000
Formation of dense diamond films
조밀한 다이아몬드 막의 합성
- Park, Sang-Hyun (Kyung-nam University) ;
- Park, Jae-Yoon (Kyung-nam University) ;
- Koo, Hyo-Geun (Masan College)
- Published : 2000.07.17
Abstract
To grow the diamond films by using RF-MW mix-process, at first, diamond seeds were deposited on silicon substrate by RF plasma CVD, and then a diamond layer grown by MW plasma CVD on the seeds. The grain-size of diamond films deposited by using HF-MW mix-process was smaller and denser than those of the MW plasma CVD process. The deposited diamond films were analyzed by scanning electron microscophy, X-ray diffractometer and Raman spectroscopy.
Keywords