YBCO/STO/YBCO 다층박막 제작

Fabrication of YBCO/STO/YBCO Multilayer

We have fabricated YBCO/STO/YBCO multilayer by the pulsed laser deposition method varing the deposition condition of insulating STO layer. Superconducting properties of both YBCO layers are sensitively affected by the deposition condition of STO layer. We obtained the upper YBCO layer of T$_{c(zero)}\;{\sim}\;$90 K with a good reproducibility, however, T$_{c(zero)}$ of lower YBCO layer was decreased to about 80 K maybe due to the oxygen loss during the deposition of STO layer. Superconducting properties of both YBCO layers at every fabrication step were measured in order to study the reason for the deterioration of superconducting properties.