Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

1999.10a
/
Pages.60-61
/
1999

The Korean Institute of Surface Engineering (한국표면공학회)

권호 표지

Thin Film Vacuum Deposition Equipment Operable in Wide Range of Working Gas Pressure

광대역 작업압력 상태에서 작동되는 진공박막 증착장비

김창조 (한국생산기술연구원) ;
리의재 (한국생산기술연구원) ;
김재홍 (진공과학)

Published : 1999.10.01

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