Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
- /
- Pages.116-116
- /
- 1999
Growth Characteristics of Zirconia thin films by Metal-Organic Chemical Vapor Deposition using Ultrasonic nebulization
초음파분무 MOCVD을 이용한 지르코니아 박막의 성장 특성
Abstract
Keywords