Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
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- Pages.102-102
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- 1999
Microstructural Characterization of Copper Metalorganic Chemical Vapor Deposition(MOCVD)
MOCVD법으로 증착된 구리 박막의 특성평가
Abstract
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