Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
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- Pages.100-100
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- 1999
A study of the formation of CuClx produced by the reaction between Cu and $Cl_2$
$Cl_2$ 를 이용한 건식 식각중 생성되는 $CuCl_x$ 형성에 관한 연구
Abstract
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