한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1999년도 춘계학술발표강연 및 눈문개요집
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- Pages.37-37
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- 1999
The Properties of Inductively Coupled Plasma Oxidized Polysilicon Films and Thin Film Transistors
- Park, Yong-Woo (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
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Ahn, Jin-Hyung
(Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
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Ahn, Byung-Tae
(Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
- 발행 : 1999.05.01