Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
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- Pages.31-31
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- 1999
Physical Properties of Boron Doped Hydrogenated Amorphous Silicon Carbide Thin Films Prepared by PECVD
PECVD법으로 제조된 B-doped 수소화된 비정질 실리콘카바이드 박막의 물성
Abstract
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