한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1999년도 춘계학술발표강연 및 눈문개요집
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- Pages.23-23
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- 1999
유기화학기상증착법에 의해 poly-Si위에 증착된 Pt/Ru 하부전극의 특성연구
Characteristics of Pt/Ru Bottom Electrode Deposited on poly-Si by Metalorganic Chemical Vapor Deposition
- Choi, Eun-Suck (Department of Materials Engineering, Chungnam National University) ;
- Hwang, Jun-Sik (Department of Materials Engineering, Chungnam National University) ;
- Yoon, Soon-Gil (Department of Materials Engineering, Chungnam National University)
- 발행 : 1999.05.01