Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
- /
- Pages.18-18
- /
- 1999
Effect of $Ar_{+}$ ion on the intrinsic stress during deposition of SiOF thin films by ECRPECVD
ECRPECVD법에 의한 SiOF 박막 증착시 $Ar_{+}$ 이온이 고유 응력에 미치는 영향
Abstract
Keywords