Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
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- Pages.16-16
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- 1999
A Study on the Characteristics of TiN Thin Film Formed by Atomic Layer Deposition Method
원자층 증착법으로 형성한 TiN 박막의 특성 연구
Abstract
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