Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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C-axis Orientation of ZnO Thin Films Prepared by FTS Method

대향타겟식스퍼터링으로 제작된 ZnO 박막의 C-축 배향성

  • 금민종 (경원대학교 공대 전기전자공학부) ;
  • 손인환 (신성대학) ;
  • 최형욱 (경원대학교 공대 전기전자공학부) ;
  • 최동진 (경원대학교 공대 전기전자공학부) ;
  • 김경환 (경원대학교 공대 전기전자공학부)
  • Published : 1999.05.01
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Abstract

We prepared ZnO thin film with Facing Targets Sputtering system that can deposit thin film in plasma-free situation and change the deposition condition in wide range. And prepared thin films c-axis orientation and grain size were analyzed by XRD(x-ray dffractometer). In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin film with good c-axis orientation.

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