Fabrication and Characteristics of Low Temperature Firing Substrate by Tape Casting in Fluormica System

Tape Casting에 의한 fluormica계 제조 및 특성 저온 소결 기판의 제조 및 특성

We fabricated green sheet by tape casting method with fluormica glass-ceramic powders for fabrication of low temperature co-firing substrate. After ball milling with organic additives, we investigated green strength and density of green sheets which were casted by doctor blade machine. Green sheets were sintered at 700 ~ 1,00$0^{\circ}C$ for 1 ~3hrs. Microstructure, linear shrinkage and dielectric constant of substrates were surveyed.