An investigation of electrical characteristics of MPPO(Modified-Polyphenylene Oxide) by gas ion implantion

가스이온 주입에 의한 MPPO의 전기적 특성조사

MPPO(Modified-Polyphenylene Oxide) was irradiated with helium, nitrogen, and argon ions at the ion energy of 50 keV and 70 keV from the dose region of 5$\times$10$^{15}$ to 5$\times$10$^{16}$ ions/$\textrm{cm}^2$. The resistance of the irradiated MPPO surface could be decresed about 10$^{10}$ to 10$^{7}$ $\Omega$/sq with increasing the total ion dose and ion energy. Chemical characteristics of the irradiated surface were analyzed by XPS(X-ray photoelectron spectroscopy).